On-Chip Magnetic Sensor for HW Security
Objective: Build on-chip MTJ field sensor for in-situ power monitoring of ICs.
Feature: MgObased magnetic field sensor integrated on CMOS chip.
We are developing an on-chip in-plane magnetic field sensor with a magnetic tunnel junction of MgOtunnel barrier. A flux guide design is to be implemented to enhance the field sensitivity. The entire fabrication process is being developed in house including chemical mechanical polishing process and fabrication MgObased magnetic tunnel junctions.
On Chip Power Monitoring
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